Vibratory gyroscope using piezoelectric film

ABSTRACT

A vibrating gyroscope according to this invention includes a ring-shaped vibrating body  11  having a uniform plane, a leg portion  15  flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode  16 , and a plurality of electrodes  13   a   , 13   b, . . . ,    13   f  formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG.  1 , when one of driving electrodes  13   a  for exciting a primary vibration of the ring-shaped vibrating body  11  in a vibration mode of cos Nθ is set as a reference driving electrode, the plurality of remaining electrodes  13   b, . . . ,    13   f  are disposed at specific positions. Such disposition allows this vibrating gyroscope to excite a primary vibration in an out-of-plane vibration mode of cos 2θ as well as detect a uniaxial or biaxial angular velocity by adopting a secondary vibration detector in an in-plane vibration mode of cos 3θ.

TECHNICAL FIELD

The present invention relates to a vibrating gyroscope using a piezoelectric film, and more particularly relates to a vibrating gyroscope that is capable of measuring variations in maximally biaxial angular velocity.

BACKGROUND ART

In recent years, vibrating gyroscopes using piezoelectric materials have been widely developed. There have been conventionally developed a gyroscope as described in Patent Document 1, including a vibrating body itself made of such a piezoelectric material. On the other hand, there is a gyroscope using a piezoelectric film that is formed on a vibrating body. For example, Patent Document 2 discloses a technique for, using a PZT film as a piezoelectric material, exciting a primary vibration of a vibrating body as well as for detecting partial distortion of a gyroscope, which is caused by a coriolis force generated when an angular velocity is applied to the vibrating body.

Reduction in size of a gyroscope itself is also an important issue as a wide variety of devices mounted with gyroscopes have been quickly reduced in size. In order to reduce the size of a gyroscope, significant improvement is required to accuracy of processing each member of the gyroscope. Desired in the industry are not only simple size reduction but also further improvement in performance of a gyroscope, namely, in accuracy of detecting an angular velocity. However, the configuration of the gyroscope described in Patent Document 2 does not satisfy the demand over the last few years for reduction in size or improvement in performance.

In view of the above technical problems, the applicants of the present invention propose a technical idea of basically performing all the manufacturing steps in a dry process to realize high processing accuracy as well as to satisfy the demand for high performance as a vibrating gyroscope (Patent Document 3).

In addition to the above technical problems, expectations are being increased for a vibrating gyroscope that measures an angular velocity of multi rotational axes (Patent Document 4, for example). Nevertheless, satisfactory development has not yet been made to a vibrating gyroscope that has a simple and useful configuration to realize reduction in size.

Patent Document 1: Japanese Unexamined Patent Publication No. H08-271258

Patent Document 2: Japanese Unexamined Patent Publication No. 2000-9473 Patent Document 3: Japanese Patent Application No. 2008-28835 Patent Document 4: Japanese Patent Application No. 2005-529306 Patent Document 5: Japanese Published Patent Publication No. 2002-509615 Patent Document 6: Japanese Published Patent Publication No. 2002-510398 DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

As described above, it is very difficult to achieve reduction in size and high processing accuracy in a vibrating gyroscope using a piezoelectric film as well as to satisfy, at the same time, the demand for improvement in performance of the gyroscope. A gyroscope of a small size generally has a problem that, upon application of an angular velocity to a vibrating body, weakened is a signal to be detected by a detection electrode of the gyroscope. Moreover, the vibrating gyroscope according to Patent Document 4 described above adopts a system of substantially measuring variations in capacitance while being capable of measuring an angular velocity of multi rotational axes. As shown in FIGS. 2 and 3 of Patent Document 4, this vibrating gyroscope has a complex configuration in which several electrodes are not disposed on a vibrating body. Therefore, the technical value will be further increased if a vibrating gyroscope is capable of also measuring an angular velocity of multi rotational axes in a simple configuration to realize reduction in size.

Solutions to the Problems

The present invention solves the above technical problems to significantly contribute to reduction in size and improvement in performance of a vibrating gyroscope that uses a piezoelectric film and is capable of measuring an angular velocity of a single or multi rotational axes. The inventors studied intensively to obtain a configuration for solving the respective technical problems by causing the piezoelectric film to excite a primary vibration as well as to detect a secondary vibration generated by a coriolis force. Found as a result is that measurement of angular velocities of a single rotational axis as well as of multi rotational axes is enabled by refining the disposition of respective types of electrodes configured by the piezoelectric film as well as the configuration for supporting the vibrating body. Furthermore, the inventors found that such disposition thereof can be achieved by a dry process realizing high processing accuracy. The present invention was created through such a philosophy. It is noted that, in the present application, an “annular or polygonal vibrating gyroscope” is sometimes simply referred to as a “ring-shaped vibrating gyroscope”.

A vibrating gyroscope according to the present invention includes: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. The plurality of electrodes include:

(1) when N is a natural number of 2 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and

(2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N+1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N (hereinafter, always true in this paragraph), the group of detection electrodes having an electrode disposed [{360/(N+1)}×S]° apart from the reference driving electrode and/or an electrode disposed [{360/(N+1)}×{S+(½)}]° apart from the reference driving electrode.

Further, each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

In this vibrating gyroscope, since a piezoelectric element is formed as an electrode in the specific region described above on the plane of the ring-shaped vibrating body, the piezoelectric element functions as a uniaxial angular velocity sensor and is capable of exciting the primary vibration as well as detecting the secondary vibration. In other words, this vibrating gyroscope is capable of exciting the primary vibration in a vibration mode not on a plane including the piezoelectric element (hereinafter, also referred to as an out-of-plane vibration mode) as well as of detecting the secondary vibration in a vibration mode in the plane (hereinafter, also referred to as an in-plane vibration mode) only with use of the piezoelectric element formed on the plane of the ring-shaped vibrating body, with no piezoelectric element being formed on a side surface of the ring-shaped vibrating body. Moreover, as the piezoelectric element is formed only on the plane of the ring-shaped vibrating body, it is possible to fabricate the electrode and the ring-shaped vibrating body with a high degree of accuracy in accordance with the dry process technique. The term “flexible” is used to mean “so as to allow the vibrating body to vibrate” in the entire invention of the present application.

Further, it is recognized as significantly advantageous that, when the above detection electrodes are referred to as first detection electrodes and detection electrodes configured according to (3) described below are added as second detection electrodes to the plurality of electrodes of the above uniaxial vibrating gyroscope, realized is detection of an angular velocity by adopting a totally biaxial (an X axis and a Y axis, for example) in-plane vibration mode. In this case, the detection electrodes configured according to (4) are disposed on the second electrode disposition portion.

(3) a group of second detection electrodes for detecting a secondary vibration of a vibration axis {90/(N+1)}° apart from that of the secondary vibration described in (2), and, when S=0, 1, . . . , N (hereinafter, always true in this paragraph), the group of second detection electrodes having an electrode disposed [{360/(N+1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N+1)}×{S+(¾)}]° apart from the reference driving electrode

A different vibrating gyroscope according to the present invention includes: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. The plurality of electrodes include:

(1) when N is a natural number of 2 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and

(2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N+1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N (hereinafter, always true in this paragraph), the group of detection electrodes having an electrode disposed [{360/(N+1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N+1)}×{S+(¾)}]° apart from the reference driving electrode.

Further, each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

In this vibrating gyroscope, since a piezoelectric element is formed as an electrode in the specific region described above on the plane of the ring-shaped vibrating body, the piezoelectric element functions as a uniaxial angular velocity sensor and is capable of exciting the primary vibration as well as detecting the secondary vibration. In other words, this vibrating gyroscope is capable of exciting the primary vibration in an out-of-plane vibration mode as well as of detecting the secondary vibration in an in-plane vibration mode only with use of the piezoelectric element formed on the plane of the ring-shaped vibrating body, with no piezoelectric element being formed on a side surface of the ring-shaped vibrating body. Moreover, as the piezoelectric element is formed only on the plane of the ring-shaped vibrating body, it is possible to fabricate the electrode and the ring-shaped vibrating body with a high degree of accuracy in accordance with the dry process technique.

A different vibrating gyroscope according to the present invention includes: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. The plurality of electrodes include:

(1) when N is a natural number of 3 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and

(2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N−1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N−2 (hereinafter, always true in this paragraph), the group of detection electrodes having an electrode disposed [{360/(N−1)}×S]° apart from the reference driving electrode and/or an electrode disposed [{360/(N−1)}×{S+(½)}]° apart from the reference driving electrode.

Each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

In this vibrating gyroscope, since a piezoelectric element is formed as an electrode in the specific region described above on the plane of the ring-shaped vibrating body, the piezoelectric element functions as a uniaxial angular velocity sensor and is capable of exciting the primary vibration as well as detecting the secondary vibration. In other words, this vibrating gyroscope is capable of exciting the primary vibration in an out-of-plane vibration mode as well as of detecting the secondary vibration in an in-plane vibration mode only with use of the piezoelectric element formed on the plane of the ring-shaped vibrating body, with no piezoelectric element being formed on a side surface of the ring-shaped vibrating body. Moreover, as the piezoelectric element is formed only on the plane of the ring-shaped vibrating body, it is possible to fabricate the electrode and the ring-shaped vibrating body with a high degree of accuracy in accordance with the dry process technique.

Further, it is recognized as significantly advantageous that, when the above detection electrodes are referred to as first detection electrodes and detection electrodes configured according to (3) described below are added as second detection electrodes to the plurality of electrodes of the above uniaxial vibrating gyroscope, realized is detection of an angular velocity by adopting a totally biaxial (the X axis and the Y axis, for example) in-plane vibration mode. In this case, the detection electrodes configured according to (4) are disposed on the second electrode disposition portion.

(3) a group of second detection electrodes for detecting a secondary vibration of a vibration axis {90/(N−1)}° apart from that of the secondary vibration described in (2), and, when S=0, 1, . . . , N−2 (hereinafter, always true in this paragraph), the group of second detection electrodes having an electrode disposed [{360/(N−1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N−1)}×{S+(¾)}]° apart from the reference driving electrode

A different vibrating gyroscope according to the present invention includes: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. The plurality of electrodes include:

(1) when N is a natural number of 3 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and

(2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N−1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N−2 (hereinafter, always true in this paragraph), the group of detection electrodes having an electrode disposed [{360/(N−1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N−1)}×{S+(¾)}]° apart from the reference driving electrode.

Each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

In this vibrating gyroscope, since a piezoelectric element is formed as an electrode in the specific region described above on the plane of the ring-shaped vibrating body, the piezoelectric element functions as a uniaxial angular velocity sensor and is capable of exciting the primary vibration as well as detecting the secondary vibration. In other words, this vibrating gyroscope is capable of exciting the primary vibration in an out-of-plane vibration mode as well as of detecting the secondary vibration in an in-plane vibration mode only with use of the piezoelectric element formed on the plane of the ring-shaped vibrating body, with no piezoelectric element being formed on a side surface of the ring-shaped vibrating body. Moreover, as the piezoelectric element is formed only on the plane of the ring-shaped vibrating body, it is possible to fabricate the electrode and the ring-shaped vibrating body with a high degree of accuracy in accordance with the dry process technique.

Further, it is a preferable aspect to add monitor electrodes configured according to (4) described below to the plurality of electrodes of any one of the biaxial vibrating gyroscopes described above, since the disposition of other electrode groups and/or the metal tracks is facilitated in a limited planar region of a ring-shaped vibrating body that is particularly reduced in size.

(4) when N is a natural number of 2 or more and M=0, 1, . . . , N−1 (hereinafter, always true in this paragraph), a group of monitor electrodes disposed [(360/N)×{M+(½)}]° apart from the reference driving electrode in the circumferential direction

EFFECTS OF THE INVENTION

In a vibrating gyroscope according to the present invention, since a piezoelectric element is formed as an electrode in the specific region described above on the plane of the ring-shaped vibrating body, the piezoelectric element functions as a uniaxial or biaxial angular velocity sensor and is capable of exciting the primary vibration as well as detecting the secondary vibration. In other words, this vibrating gyroscope is capable of exciting the primary vibration in an out-of-plane vibration mode as well as of detecting the secondary vibration in an in-plane vibration mode only with use of the piezoelectric element formed on the plane of the ring-shaped vibrating body, with no piezoelectric element being formed on a side surface of the ring-shaped vibrating body. Moreover, as the piezoelectric element is formed only on the plane of the ring-shaped vibrating body, it is possible to fabricate the electrode and the ring-shaped vibrating body with a high degree of accuracy in accordance with the dry process technique.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to an embodiment of the present invention.

FIG. 2 is a cross sectional view taken along line A-A of FIG. 1.

FIG. 3A is a cross sectional view showing a process in the steps of manufacturing a part of the ring-shaped vibrating gyroscope according to the embodiment of the present invention.

FIG. 3B is a cross sectional view showing a process in the steps of manufacturing the part of the ring-shaped vibrating gyroscope according to the embodiment of the present invention.

FIG. 3C is a cross sectional view showing a process in the steps of manufacturing the part of the ring-shaped vibrating gyroscope according to the embodiment of the present invention.

FIG. 3D is a cross sectional view showing a process in the steps of manufacturing the part of the ring-shaped vibrating gyroscope according to the embodiment of the present invention.

FIG. 3E is a cross sectional view showing a process in the steps of manufacturing the part of the ring-shaped vibrating gyroscope according to the embodiment of the present invention.

FIG. 3F is a cross sectional view showing a process in the steps of manufacturing the part of the ring-shaped vibrating gyroscope according to the embodiment of the present invention.

FIG. 4 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to another embodiment of the present invention.

FIG. 5 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to still another embodiment of the present invention.

FIG. 6 is a cross sectional view, which corresponds to FIG. 2, of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 7 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 8 is a cross sectional view taken along line B-B of FIG. 7.

FIG. 9 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 10 is a cross sectional view taken along line C-C of FIG. 9.

FIG. 11A is a view conceptually illustrating a primary vibration in an out-of-plane vibration mode of cos 2θ according to an embodiment of the present invention.

FIG. 11B is a view conceptually illustrating a secondary vibration in an in-plane vibration mode of cos 3θ in a case where an angular velocity is applied about an X axis, according to an embodiment of the present invention.

FIG. 11C is a view conceptually illustrating a secondary vibration in an in-plane vibration mode of cos 3θ in a case where an angular velocity is applied about a Y axis, according to an embodiment of the present invention.

FIG. 12A is a view conceptually illustrating a primary vibration in an out-of-plane vibration mode of cos 3θ according to a different embodiment of the present invention.

FIG. 12B is a view conceptually illustrating a primary vibration in an in-plane vibration mode of cos 2θ in a case where an angular velocity is applied about an X axis, according to a different embodiment of the present invention.

FIG. 12C is a view conceptually illustrating a primary vibration in an in-plane vibration mode of cos 2θ in a case where an angular velocity is applied about a Y axis, according to a different embodiment of the present invention.

FIG. 13 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 14A is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 14B is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 14C is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 14D is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 14E is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

FIG. 14F is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope according to a different embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention are described in detail with reference to the accompanying drawings. In the description, common parts are denoted by common reference symbols in all the drawings unless otherwise specified. Further, the elements in these embodiments are not necessarily illustrated in accordance with the same scale.

First Embodiment

FIG. 1 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope 100 for measuring a biaxial angular velocity according to the present embodiment. FIG. 2 is a cross sectional view taken along line A-A of FIG. 1. For the purpose of easier illustration, an X axis and a Y axis are indicated in FIG. 1.

As shown in FIGS. 1 and 2, the ring-shaped vibrating gyroscope 100 according to the present embodiment is generally divided into three structures. A first structure includes a ring-shaped vibrating body 11 formed with a silicon substrate 10, a silicon oxide film 20 on an upper plane (hereinafter, referred to as an upper surface) of the ring-shaped vibrating body 11, and a plurality of electrodes 13 a to 13 f formed thereon with a piezoelectric film 40 sandwiched between a lower-layer metallic film 30 and an upper-layer metallic film 50. In the present embodiment, the upper-layer metallic film 50 configuring the plurality of electrodes 13 b to 13 e has an outer end or an inner end formed inside by approximately 1 μm with respect to the outer peripheral edge or the inner peripheral edge of the ring-shaped vibrating body 11 that has a ring-shaped plane of approximately 40 μm wide, so as to be approximately 12 μm wide. In the upper-layer metallic film 50, the four electrodes 13 a and 13 f are formed to include a center line so as to be approximately 12 μm wide. The twelve electrodes are formed outside a line connecting centers (hereinafter, simply referred to as a center line) of both ends in the width direction of the ring-shaped plane that serves as the upper surface of the ring-shaped vibrating body 11. The remaining twelve electrodes are formed inside the center line.

In the present embodiment, a primary vibration of the ring-shaped vibrating gyroscope 100 is excited in an out-of-plane vibration mode of cos 2θ as shown in FIG. 11A. A secondary vibration in the present embodiment has an in-plane vibration mode of cos 3θ with respect to the X axis as shown in FIG. 11B and an in-plane vibration mode of cos 3θ with respect to the Y axis as shown in FIG. 11C.

Thus, the plurality of electrodes 13 a to 13 f are categorized as follows. Firstly, two driving electrodes 13 a, 13 a are disposed 180° apart from each other in a circumferential direction. Alternating-current power supplies to be connected with the driving electrodes 13 a, 13 a are not illustrated for the purpose of easier comprehension of the figure. In a case where one of the above two driving electrodes 13 a, 13 a (for example, the driving electrode 13 a disposed in the direction of twelve o'clock in FIG. 1) is set as a reference electrode, two monitor electrodes 13 f, 13 f are disposed 90° and 270° apart from the driving electrode 13 a in the circumferential direction. Assume that the plane of the ring-shaped vibrating body on which a piezoelectric element is disposed, in other words, the drawing sheet of FIG. 1, is an X-Y plane. In this case, first detection electrodes 13 b, 13 c are disposed 0°, 60°, 120°, 180°, 240°, and 300° apart from the reference electrode in the circumferential direction. Each of the first detection electrodes 13 b, 13 c detects a secondary vibration generated when an angular velocity about the X axis is applied to the ring-shaped vibrating gyroscope 100. Similarly, second detection electrodes 13 d, 13 e are disposed 30°, 90°, 150°, 210°, 270°, and 330° apart from the reference electrode in the circumferential direction. Each of the second detection electrodes 13 d, 13 e detects a secondary vibration generated when an angular velocity about the Y axis is applied to the ring-shaped vibrating gyroscope 100.

In the present embodiment, the lower-layer metallic film 30 and the upper-layer metallic film 50 are 100 nm thick, respectively, and the piezoelectric film 40 is 3 μm thick. The silicon substrate 10 is 100 μm thick.

In the present embodiment and other embodiments to be described later, there are two categorized portions in which the respective electrodes are disposed. One of the portions is referred to as a second electrode disposition portion, in which the first detection electrodes 13 b, 13 c and the second detection electrodes 13 d, 13 e are disposed, which includes a region from the outer peripheral edge of the upper surface of the ring-shaped vibrating body 11 to a vicinity of the outer peripheral edge and/or a region from the inner peripheral edge thereof to a vicinity of the inner peripheral edge. Another one of the two portions is referred to as a first electrode disposition portion, in which the respective driving electrodes 13 a, 13 a are disposed, which is located on the upper surface of the ring-shaped vibrating body 11 so as not to be electrically connected to the second electrode disposition portion.

A second structure includes leg portions 15, . . . , 15 that are each connected to a part of the ring-shaped vibrating body 11. These leg portions 15, . . . , 15 are also formed with the silicon substrate 10. Formed on the entire upper surfaces of the leg portions 15, . . . , 15 are the silicon oxide film 20, the lower-layer metallic film 30, and the piezoelectric film 40 described above which are provided continuously to the portions of the respective films on the ring-shaped vibrating body 11. Further formed on a center line in the upper surface of the piezoelectric film 40 is the upper-layer metallic film 50 which serves as metal tracks 14, . . . , 14 of approximately 8 μm wide.

In the present embodiment, the plurality of metal tracks 14 are formed on twelve leg portions 15, . . . , 15 out of twenty four leg portions 15, . . . , 15. These metal tracks 14 are formed to obtain paths to electrode pads 18 on a post 19 from the respective electrodes that are disposed in the region from the outer peripheral edge of the ring-shaped vibrating body 11 to the vicinity of the outer peripheral edge or are disposed so as to include the center line. Particularly in the present embodiment, the metal tracks 14, 14 are provided from both ends of each of the second detection electrodes 13 b, 13 d so as to eliminate variations in electrical signals from the second detection electrodes 13 b, 13 d. The function of the vibrating gyroscope is not affected even in a case where the metal tracks 14, 14 are provided only from one of the ends of the respective second detection electrodes 13 b, 13 d.

A third structure includes the post 19 that is formed with the silicon substrate 10 provided continuously to the portions of the above leg portions 15, . . . , 15. In the present embodiment, the post 19 is connected to a package portion (not shown) of the ring-shaped vibrating gyroscope 100 and serves as a fixed end. The post 19 is provided with the electrode pads 18, . . . , 18. As shown in FIG. 2, formed on the upper surface of the post 19 are the silicon oxide film 20, the lower-layer metallic film 30, and the piezoelectric film 40 described above, which are provided continuously to the portions of the respective films on the leg portions 15, . . . , 15 except for the portion of the fixed potential electrode 16 that functions as the ground electrode. In this case, the lower-layer metallic film 30 formed on the silicon oxide film 20 functions as the fixed potential electrode 16. On the upper surface of the piezoelectric film 20 formed above the post 19, there are formed the metal tracks 14, . . . , 14 as well as the electrode pads 18, . . . , 18 which are provided continuously to the portions of the metal tracks on the leg portions 15, . . . , 15.

Described next with reference to FIGS. 3A to 3F is a method for manufacturing the ring-shaped vibrating gyroscope 100 according to the present embodiment. FIGS. 3A to 3F are cross sectional views each showing a part of the portion shown in FIG. 2.

Firstly, as shown in FIG. 3A, laminated on the silicon substrate 10 are the silicon oxide film 20, the lower-layer metallic film 30, the piezoelectric film 40, and the upper-layer metallic film 50. Each of these films is formed by known film formation means. In the present embodiment, the silicon oxide film 20 is a thermally oxidized film obtained by known means. The lower-layer metallic film 30, the piezoelectric film 40, and the upper-layer metallic film 50 are each formed in accordance with a known sputtering method. It is noted that formation of each of these films is not limited to the above example but these films may be alternatively formed by any other known means.

The upper-layer metallic film 50 is then partially etched. In the present embodiment, there is formed a known resist film on the upper-layer metallic film 50, and dry etching is then performed on the basis of a pattern formed in accordance with the photolithographic technique, so that formed is the upper-layer metallic film 50 shown in FIG. 3B. In this case, the upper-layer metallic film 50 was dry etched under the condition for the known reactive ion etching (RIE) using argon (Ar) or mixed gas containing argon (Ar) and oxygen (O₂).

Thereafter, as shown in FIG. 3C, the piezoelectric film 40 is partially etched. Firstly, similarly to the above, the piezoelectric film 40 is dry etched on the basis of the resist film that is patterned in accordance with the photolithographic technique. In the present embodiment, the piezoelectric film 40 was dry etched under the condition for the known reactive ion etching (RIE) using mixed gas containing argon (Ar) and C₂F₆ gas, or mixed gas containing argon (Ar), C₂F₆ gas, and CHF₃ gas.

Then, as shown in FIG. 3D, the lower-layer metallic film 30 is partially etched. In the present embodiment, dry etching is performed using the resist film that is again patterned in accordance with the photolithographic technique, so as to form the fixed potential electrode 16 utilizing the lower-layer metallic film 30. In the present embodiment, the fixed potential electrode 16 is used as the ground electrode. In the present embodiment, the lower-layer metallic film 30 was dry etched under the condition for the known reactive ion etching (RIE) using argon (Ar) or mixed gas containing argon (Ar) and oxygen (O₂).

In the present embodiment, the resist film is formed to be approximately 4 μm thick so that the silicon oxide film 20 and the silicon substrate 10 are thereafter continuously etched with the above resist film formed again serving as an etching mask. However, even in a case where this resist film disappears during etching the silicon substrate 10, the selectivity of the etching rate relative to an etchant applied to the silicon substrate 10 functions advantageously. Therefore, the performance of any one of the upper-layer metallic film 50, the piezoelectric film 40, and the lower-layer metallic film 30 is not substantially affected by the above etching. In other words, in the present embodiment, since the ring-shaped vibrating body 11 is formed with the silicon substrate, it is possible to apply the known silicon trench etching technique with an adequately high selectivity with respect to the resist film. Even in a case where the resist film disappears, there is provided an adequate selectivity such that the upper-layer metallic film or the piezoelectric film provided therebelow serves as a mask for etching silicon.

Thereafter, as shown in FIGS. 3E and 3F, the silicon oxide film 20 and the silicon substrate 10 are dry etched as described above using the resist film that is provided for etching the lower-layer metallic film 30. In the present embodiment, the silicon oxide film 20 was dry etched under the condition for the known reactive ion etching (RIE) using argon (Ar) or mixed gas containing argon (Ar) and oxygen (O₂). The known silicon trench etching technique is applied to the dry etching of the silicon substrate 10 in the present embodiment. In this case, the silicon substrate 10 is etched so as to be penetrated. Thus, the dry etching described above is performed in a state where a protective substrate, which prevents a stage to allow the silicon substrate 10 to be mounted thereon from being exposed to plasma upon penetration, is attached to the silicon substrate 10 with grease of high thermal conductivity serving as a lower layer of the silicon substrate 10. Accordingly, it is a preferable aspect to adopt the dry etching technique described in Japanese Unexamined Patent Publication No. 2002-158214, for example, in order to prevent corrosion of a plane perpendicular to the thickness direction of the silicon substrate 10, that is, an etching side surface, after the penetration.

As described above, the silicon substrate 10 and the respective films laminated on the silicon substrate 10 are etched to form the main structural portion of the ring-shaped vibrating gyroscope 100. Subsequently performed are the steps of accommodating the main structural portion into the package by known means as well as wiring. As a result, there is formed the ring-shaped vibrating gyroscope 100. Therefore, this vibrating gyroscope 100, which has no piezoelectric element on a side surface of the ring-shaped vibrating body 11, realizes excitation of an out-of-plane primary vibration as well as detection of a maximally biaxial in-plane secondary vibration with use of only the piezoelectric element formed on the plane of the ring-shaped vibrating body 11. As a result, it is possible to manufacture the vibrating gyroscope 100 in accordance with the above dry process technique that realizes low cost mass production with a high degree of accuracy.

Described below are the functions of the respective electrodes included in the ring-shaped vibrating gyroscope 100. As already described, excited in the present embodiment is the primary vibration in an out-of-plane vibration mode of cos 2θ. As the lower-layer metallic film 30 is formed continuously to the fixed potential electrode 16 being grounded, the lower-layer metallic film 30 is uniformly set to 0 V.

Firstly, an alternating-current voltage of 1 V_(P-0) is applied to each of the two driving electrodes 13 a, 13 a. As a result, the piezoelectric film 40 is expanded and contracted to excite the primary vibration. In the present embodiment, the upper-layer metallic film 50 is formed to include the center line of the ring-shaped vibrating body 11 in a plan view. In this state, due to deformation of the piezoelectric film, a secondary vibration in an in-plane vibration mode is unlikely to be excited. However, the respective driving electrodes 13 a may be disposed not to include the center line as long as the resonance point of the primary vibration and that of the secondary vibration are different from each other in the ring-shaped vibrating body 11.

Then, each of the monitor electrodes 13 f, 13 f shown in FIG. 1 detects an amplitude and a resonant frequency of the above primary vibration, and transmits a signal to a known feedback control circuit (not shown). The feedback control circuit in the present embodiment controls using the signals from the monitor electrodes 13 f, 13 f such that the frequency of the alternating-current voltage applied to each of the driving electrodes 13 a, 13 a is equal to the natural frequency of the ring-shaped vibrating body 11, as well as such that the amplitude of the ring-shaped vibrating body 11 has a constant value. As a result, the ring-shaped vibrating body 11 is vibrated constantly and continuously.

Described below is a case where an angular velocity is applied about the X axis after the excitation of the primary vibration described above. Excited in this case is the secondary vibration in the in-plane vibration mode of cos 3θ as indicated in FIG. 11B.

This secondary vibration is detected by the six detection electrodes (first detection electrodes) 13 b, . . . , 13 b and the other six detection electrodes (first detection electrodes) 13 c, . . . , 13 c. In the present embodiment, as shown in FIG. 1, the respective detection electrodes 13 b, 13 c are disposed in correspondence with the vibration axis of the in-plane secondary vibration. The respective detection electrodes 13 b, 13 c in the present embodiment are disposed respectively outside and inside the center line on the upper surface of the ring-shaped vibrating body 11 so as to detect most easily the secondary vibration to be detected, namely, the vibration in the in-plane vibration mode.

In the present embodiment, because of the disposition of the respective detection electrodes 13 b, 13 c, the detection electrodes 13 b, 13 c generate electrical signals of positive/negative polarities inverse to each other in accordance with the in-plane secondary vibration excited upon application of the angular velocity. Thus obtained in an arithmetic circuit functioning as a known difference circuit are differences between the electrical signals of the respective detection electrodes 13 b, 13 c. Resulting detection signals of this case have approximately doubled detectability in comparison to the case with only one kind of the detection electrodes.

Described below is a case where an angular velocity is applied about the Y axis after the excitation of the primary vibration described above. Excited in this case is the secondary vibration in the in-plane vibration mode of cos 3θ as indicated in FIG. 11C.

This secondary vibration is detected by the six detection electrodes (second detection electrodes) 13 d, . . . , 13 d and the other six detection electrodes (second detection electrodes) 13 e, . . . , 13 e. In the present embodiment, as shown in FIG. 1, the respective detection electrodes 13 d, 13 e are disposed in correspondence with the vibration axis of the in-plane secondary vibration. The respective detection electrodes 13 d, 13 e in the present embodiment are also disposed respectively outside and inside the center line on the upper surface of the ring-shaped vibrating body 11 so as to detect most easily the secondary vibration to be detected, namely, the vibration in the in-plane vibration mode.

In the present embodiment, because of the disposition of the respective detection electrodes 13 b, 13 c, the detection electrodes 13 d, 13 e generate electrical signals of positive/negative polarities inverse to each other in accordance with the in-plane secondary vibration excited upon application of the angular velocity. Thus, similarly to the above case, obtained in the arithmetic circuit functioning as a known difference circuit are differences between the electrical signals of the respective detection electrodes 13 d, 13 e. Resulting detection signals of this case have approximately doubled detectability in comparison to the case with only one kind of the detection electrodes.

In the first embodiment described above, for the purpose of easier description, the detection electrodes are referred to as the first detection electrodes and the second detection electrodes, each of which detects one axial component of a biaxial angular velocity to be detected. Alternatively, the detection electrodes for the respective axes may be each arbitrarily referred to as one of the first detection electrode and the second detection electrode so as to be different from each other.

Modification (1) of First Embodiment

FIG. 4 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope 200 obtained by partially modifying the first embodiment.

The ring-shaped vibrating gyroscope 200 according to the present embodiment is configured identically with the ring-shaped vibrating gyroscope 100 of the first embodiment, except for the upper-layer metallic film 50 in the first embodiment. The manufacturing method therefor is identical with that of the first embodiment except for some steps. The vibration modes of the primary vibration and the secondary vibration in the present embodiment are identical with those of the first embodiment. Accordingly, the description duplicating with that of the first embodiment will not be repeatedly provided.

As shown in FIG. 4, the ring-shaped vibrating gyroscope 200 according to the present embodiment includes four detection electrodes 13 b, 13 c, 13 d, 13 e. The effect of the present invention is substantially exerted even with such disposition of the respective detection electrodes. More specifically, provision of the respective detection electrodes 13 b, 13; 13 d, 13 e achieves detection of an angular velocity by adopting the biaxial (the X axis and the Y axis) in-plane vibration mode. Detectability of the present embodiment is not as good as that of the first embodiment since there are provided the only four detection electrodes 13 b, 13 c, 13 d, 13 e, each of which has an area identical to the corresponding one of the first embodiment. FIG. 4 also illustrates alternating-current power supplies 12, 12, which are not included in FIG. 1 for the purpose of easier illustration. The actual alternating-current power supplies 12, 12 each apply to the corresponding driving electrode 13 a by way of the corresponding electrode pad 18 that is connected to a conductive wire. However, the alternating-current power supplies 12, 12 are not referred to in the present embodiment and in the other embodiments, for the purpose of easier description.

As the respective electrodes of the present embodiment are eccentrically located, some of the leg portions 15 are not provided with the metal tracks 14. However, the present invention is not limited to such a case. An effect similar to that of the present embodiment is exerted even in a case where the leg portions 15 not provided with the metal tracks 14 are removed. However, random absence of the leg portions 15 may cause irregular vibration of the ring-shaped vibrating body 11. It is therefore preferable to remove only the leg portions 15 that are allocated at equal angles.

Modification (2) of First Embodiment

FIG. 5 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope 300 obtained by partially modifying the first embodiment.

The ring-shaped vibrating gyroscope 300 according to the present embodiment is configured identically with the ring-shaped vibrating gyroscope 100 of the first embodiment, except for the upper-layer metallic film 50 in the first embodiment. The manufacturing method therefor is identical with that of the first embodiment except for some steps. The vibration modes of the primary vibration and the secondary vibration in the present embodiment are identical with those of the first embodiment. Accordingly, the description duplicating with that of the first embodiment will not be repeatedly provided.

As shown in FIG. 5, the ring-shaped vibrating gyroscope 300 according to the present embodiment is provided only with driving electrodes 13 a, 13 a, monitor electrodes 13 f, 13 f, an electrode 13 b as one of first detection electrodes used for measuring an angular velocity with respect to an X axis, and an electrode 13 e as one of second detection electrodes used for measuring an angular velocity with respect to a Y axis. A part of each of the driving electrodes 13 a, 13 a is located on the center line as well as from the center line to a vicinity of the inner peripheral edge. Further, each of the detection electrodes 13 b, 13 e has the electrode portion located from the center line to a vicinity of the outer peripheral edge or from the center line to a vicinity of the inner peripheral edge. Even with such disposition of the respective electrodes, there is exerted an effect substantially similar to that of the first embodiment. More specifically, when there are provided, out of the detection electrodes of the first embodiment, at least one of the first detection electrodes 13 b, 13 c for the X axis and at least one of the second detection electrodes 13 d, 13 e for the Y axis, it is possible to detect an angular velocity by adopting the biaxial (the X axis and the Y axis) in-plane vibration mode.

The respective driving electrodes 13 a are preferably disposed so as to excite only the primary vibration in the out-of-plane vibration mode as well as to be unlikely to excite the secondary vibration in the in-plane vibration mode. Such disposition is preferable because generation of the secondary vibration with no angular velocity being applied causes the ring-shaped vibrating gyroscope 300 to generate a zero point output. In the in-plane vibration mode, it is a preferable aspect to dispose the respective driving electrodes 13 a so as to include the center line as each of the driving electrodes is less deformed in a vicinity of the center line, which is unlikely to excite the secondary vibration in the in-plane vibration mode. In the in-plane vibration mode, since the driving electrodes are deformed in directions opposite to each other with respect to the center line, it is a more preferable aspect to dispose the respective driving electrodes 13 a so as to be symmetrical with respect to the center line. Even in a case where the plurality of driving electrodes 13 a are not disposed symmetrically with respect to the center line, the respective driving electrodes 13 a may be disposed in various ways so as to be unlikely to excite a vibration in an in-plane vibration mode in accordance with the vibration mode to be adopted. Accordingly, the first electrode disposition portion including the respective driving electrodes 13 a is defined as a portion on the upper surface of the ring-shaped vibrating body 11 not electrically connected to the second electrode disposition portion.

Each of the detection electrodes 13 b, 13 e has the electrode portion disposed to include the center line. In this case, the detection sensitivity for the secondary vibration in the in-plane vibration mode is improved if the electrode portions are located only in a region from the outer peripheral edge of the ring-shaped vibrating body 11 to a vicinity of the outer peripheral edge and/or only in a region from the inner peripheral edge thereof to a vicinity of the inner peripheral edge. In the in-plane vibration mode, such disposition is preferable because the driving electrodes are deformed in directions opposite to each other with respect to the center line, resulting in that a signal outputted from the electrode portion crossing the center line deteriorates the magnitude of the detection signals.

The present embodiment realizes simplification of the circuit as the difference circuit used in the first embodiment is not required. Further, in the present embodiment, one of the driving electrodes 13 a is formed to have an area larger than that of the first embodiment. Such a large area of the driving electrode 13 a also saves driving electricity.

In the present embodiment, the monitor electrode 13 f has an area equal to that of the first embodiment. However, the present invention is not limited to such a case. It is a preferable aspect to improve the detectability by increasing the area of the monitor electrode.

As the respective electrodes of the present embodiment are eccentrically located, some of the leg portions 15 are not provided with the metal tracks 14. However, the present invention is not limited to such a case. An effect similar to that of the present embodiment is exerted even in a case where the leg portions 15 not provided with the metal tracks 14 are removed. However, random absence of the leg portions 15 may cause irregular vibration of the ring-shaped vibrating body 11. It is therefore preferable to remove only the leg portions 15 that are allocated at equal angles.

Modification (3) of First Embodiment

FIG. 6 is a cross sectional view, which corresponds to FIG. 2, of a structure having a principal function in a ring-shaped vibrating gyroscope 400 obtained by partially modifying the first embodiment.

As shown in FIG. 6, in the present embodiment, the piezoelectric film 40 is etched in correspondence with the region where the upper-layer metallic film 50 is substantially formed. The alternating-current voltage applied to the upper-layer metallic film 50 is thus applied only in the vertically downward direction with no influence of the region provided with the lower-layer metallic film 30. Therefore prevented are undesired expansion and contraction motions of the piezoelectric film 40 as well as transmission of an electrical signal. In the present embodiment, after the step of dry etching the upper-layer metallic film 50, dry etching is subsequently performed under the condition same as that of the first embodiment with the residual resist film on the upper-layer metallic film 50 or the upper-layer metallic film 50 itself serving as an etching mask. As a result, there is formed the piezoelectric film 40 described above. Further, as shown in FIG. 6, the piezoelectric film 40 is etched so as to be inclined (at an inclination angle of 75°, for example) in the present embodiment. However, the piezoelectric film 40 steeply inclined as shown in FIG. 6 is dealt in the present application as being substantially visually unrecognized, with respect to other regions, in the plan view of the ring-shaped vibrating gyroscope 400 shown in FIG. 6. Furthermore, the aspect disclosed in the present embodiment in which the piezoelectric film 40 is etched is applicable at least to all the embodiments of the present application.

Modification (4) of First Embodiment

Described above in each of the first embodiment and the modifications (1) to (3) thereof is the configuration of the vibrating gyroscope that is capable of detecting a biaxial angular velocity. Also obtained from the first embodiment is the disposition of respective detection electrodes for detecting a uniaxial angular velocity.

For example, when only the first detection electrodes 13 b, 13 c used for measuring an angular velocity with respect to the X axis, out of the first and second detection electrodes 13 b, 13 c, 13 d, 13 e, are disposed on the ring-shaped vibrating body 11, manufactured is a vibrating gyroscope for detection of a uniaxial angular velocity. More specifically, it is possible to obtain the vibrating gyroscope for detection of a uniaxial angular velocity by selecting the detection electrodes for one axis out of the first detection electrodes and the second detection electrodes. As described earlier, the effect of the present invention is substantially exerted by disposing only one of the first detection electrodes (13 b, for example) out of the respective first detection electrodes 13 b, 13 c.

Second Embodiment

FIG. 7 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope 500 according to the present embodiment. FIG. 8 is a cross sectional view taken along line B-B of FIG. 7.

As shown in FIGS. 7 and 8, the ring-shaped vibrating gyroscope 500 according to the present embodiment includes a plurality of electrodes 13 a to 13 f, similarly to the ring-shaped vibrating gyroscope 100 of the first embodiment. In the present embodiment, all the electrodes are disposed outside or inside the center line.

In the present embodiment, excited to the ring-shaped vibrating gyroscope 500 is a primary vibration in an out-of-plane vibration mode of cos 3θ as indicated in FIG. 12A. On the other hand, a secondary vibration in the present embodiment has an in-plane vibration mode of cos 2θ. Accordingly, the plurality of electrodes 13 a to 13 f are categorized as follows. Firstly, there are three driving electrodes 13 a, 13 a, 13 a disposed 120° apart from each other in the circumferential direction. In a case where one of the above three driving electrodes 13 a, 13 a, 13 a (for example, the driving electrode 13 a disposed in the direction of twelve o'clock in FIG. 9) is set as a reference electrode, three monitor electrodes 13 f, 13 f, 13 f are disposed 60°, 180°, and 300° respectively apart from the reference electrode 13 a in the circumferential direction. Assume that the plane provided with a piezoelectric element on the ring-shaped vibrating body 11, in other words, the drawing sheet of FIG. 9, is referred to as an X-Y plane as indicated therein. In this case, the first detection electrodes 13 b, 13 c for detecting an angular velocity about the X axis are disposed 0′, 90°, 180°, and 270° respectively apart from the reference electrode in the circumferential direction. Similarly, the second detection electrodes 13 d, 13 e for detecting an angular velocity about the Y axis are disposed 45°, 135°, 225°, and 315° respectively apart from the reference electrode in the circumferential direction.

The effect of the present invention is substantially exerted even with the disposition of the respective detection electrodes. That is, provision of the respective detection electrodes 13 b, 13 c, 13 d, 13 e achieves detection of an angular velocity by adopting the biaxial in-plane vibration mode of cos 2θ. More specifically, FIG. 12B indicates the in-plane vibration mode of cos 2θ with respect to the X axis, while FIG. 12C indicates the in-plane vibration mode of cos 2θ with respect to the Y axis.

In the present invention, the driving electrodes 13 a, 13 a are disposed in a region from the outer peripheral edge of the ring-shaped vibrating body 11 to a vicinity of the outer peripheral edge. However, the present invention is not limited to such a case. The respective driving electrodes 13 a are preferably disposed so as to excite only the primary vibration in the out-of-plane vibration mode as well as to be unlikely to excite the secondary vibration in the in-plane vibration mode. Such disposition is preferable because generation of the secondary vibration with no angular velocity being applied causes the ring-shaped vibrating gyroscope 500 to generate a zero point output. In the in-plane vibration mode, it is a preferable aspect to dispose the respective driving electrodes 13 a so as to include the center line as each of the driving electrodes is less deformed in a vicinity of the center line, which is unlikely to excite the secondary vibration in the in-plane vibration mode. In the in-plane vibration mode, the driving electrodes are deformed in directions opposite to each other with respect to the center line, it is a more preferable aspect to dispose the respective driving electrodes 13 a so as to be symmetrical with respect to the center line.

Modification of Second Embodiment

FIG. 9 is a front view of a structure having a principal function in a ring-shaped vibrating gyroscope 600 obtained by partially modifying the first embodiment. FIG. 10 is a cross sectional view taken along line C-C of FIG. 9.

In comparison to the second embodiment, the ring-shaped vibrating gyroscope 600 in the present embodiment is provided with a fixed end 60 around the ring-shaped vibrating body 11 by way of grooves or leg portions 17. Formed on the leg portions 17 and the fixed end 60 are electrode pads 18 and the metal tracks 14 that are drawn from the driving electrodes 13 a, 13 a, 13 a and the monitor electrodes 13 f, 13 f, 13 f. Further, due to provision of the metal tracks 14 on the leg portions 17, there are not provided the metal tracks 14 and the electrode pads 18 on the leg portions 15 and the fixed end 19, respectively. In the present embodiment, eight leg portions 15 are removed out of the sixteen leg portions 15 provided in the ring-shaped vibrating gyroscope 500 of the second embodiment. The ring-shaped vibrating gyroscope 600 in the present embodiment is configured identically with that of the second embodiment except for the above points. The manufacturing method therefor is identical with that of the first embodiment except for some steps. The vibration modes of the primary vibration and the secondary vibration in the present embodiment are identical with those of the second embodiment. Accordingly, the description duplicating with that of the first embodiment will not be repeatedly provided. Alternating-current power supplies to be connected with the driving electrodes 13 a, 13 a, 13 a are not illustrated in the present embodiment for easier comprehension of the figure.

Provision of the leg portions 17 in the present embodiment requires no complex wiring on the ring-shaped vibrating body 11. Thus remarkably decreased are risks of short circuiting among the metal tracks by some defect in the manufacturing steps. As shown in FIG. 9, each of the metal tracks 14 is joined to the center portion in the longer side of the corresponding electrode, so that there are caused no variations in electrical signals. Furthermore, because of expanded distances between the respective leg portions 15, 17, expected are improvement in throughput by increase in etching rate as well as improvement in yield in the etching process in the manufacturing steps. However, provision of the fixed end 60 increases the size of the vibrating gyroscope in comparison to that of the first embodiment.

Each of the embodiments described above refers to the vibrating gyroscope using the ring-shaped vibrating body. However, the ring-shaped vibrating body may be replaced with a polygonal vibrating body. There is exerted an effect substantially similar to that of the present invention even with use of a vibrating body in a regular polygonal shape such as a regular hexagonal shape, a regular octagonal shape, a regular dodecagonal shape, a regular icosagonal shape, or the like. Further alternatively, there may be adopted a vibrating body such as a dodecagonal vibrating body 111 of a ring-shaped vibrating gyroscope 700 shown in FIG. 13. It is preferable, in view of stability of the vibrating body during the vibration motion, to adopt a vibrating body in a polygonal shape that is symmetrical with respect to a point in a front view of the vibrating body. It is noted that the “ring shape” is inclusive of an elliptical shape. Unlike FIG. 1 and the like, the leg portions and the post are not illustrated in FIG. 13 for easier comprehension of the figure.

In each of the first embodiment and the modifications (1) to (3) thereof, the monitor electrodes 13 f, 13 f are disposed at the identical positions or in the identical regions. However, the present invention is not limited to such a case. When N is a natural number of 2 or more or a natural number of 3 or more and M=0, 1, . . . , N−1 (hereinafter, always true in this paragraph), in a case where one of the driving electrodes 13 a is set as a reference driving electrode, the monitor electrodes 13 f are not necessarily disposed [(360/N)×{M+(½)}]° apart from the reference driving electrode 13 a in the circumferential direction. For example, in a vibration mode of cos Nθ, in a case where L=0, 1, . . . , 2N−1(hereinafter, always true in this paragraph), when the monitor electrodes 13 f are disposed so as not to be (180/N)×{L+(½)}]° apart from the reference driving electrode in the circumferential direction or are disposed so as not to be axisymmetrical with respect to the above angular positions, the effect of the first embodiment or a modification thereof is substantially exerted. In a limited planar region of the ring-shaped vibrating body 11 that is particularly reduced in size, the disposition of the monitor electrodes 13 f as in the first embodiment will facilitate the disposition of the other electrode groups and/or the metal tracks. More specifically, when N is a natural number of 2 or more or a natural number of 3 or more and M=0, 1, . . . , N−1 (hereinafter, always true in this paragraph), in a case where one of the driving electrodes 13 a is set as a reference driving electrode, it is a preferable aspect to dispose the monitor electrodes 13 f so as to be [(360/N)×{M+(½)}]° apart from the reference driving electrode 13 a in the circumferential direction.

One specific example of the above is a ring-shaped vibrating gyroscope 800 shown in FIG. 14A. When N is a natural number of 2 or more or a natural number of 3 or more and M=0, 1, . . . , N−1 (hereinafter, always true in this paragraph), in a case where one of the driving electrodes 13 a is set as a reference driving electrode, monitor electrodes 213 f, 213 f of the ring-shaped vibrating gyroscope 800 are not necessarily disposed [(360/N)×{M+(½)}]° apart from the reference driving electrode 13 a in the circumferential direction. However, an effect similar to that of the first embodiment is exerted even with the disposition of the monitor electrodes 213 f, 213 f, 213 f, 213 f shown in FIG. 14A.

Another example of the above is a ring-shaped vibrating gyroscope 820 shown in FIG. 14B. In the ring-shaped vibrating gyroscope 820, monitor electrodes 313 f, 313 f are disposed as if two out of the monitor electrodes 213 f, 213 f, 213 f, 213 f are removed from the ring-shaped vibrating gyroscope 800 shown in FIG. 14A. However, an effect similar to that of the first embodiment is exerted even with the disposition of the monitor electrodes 313 f, 313 f shown in FIG. 14B.

Still another example of the above is a ring-shaped vibrating gyroscope 840 shown in FIG. 14C. In the ring-shaped vibrating gyroscope 840, monitor electrodes 413 f, 413 f are disposed as if the remaining two out of the monitor electrodes 213 f, 213 f, 213 f, 213 f are removed from the ring-shaped vibrating gyroscope 800 shown in FIG. 14A. However, an effect similar to that of the first embodiment is exerted even with the disposition of the monitor electrodes 313 f, 313 f shown in FIG. 14C.

Further, a different example of the above is a ring-shaped vibrating gyroscope 860 shown in FIG. 14D. In the ring-shaped vibrating gyroscope 860, monitor electrodes 513 f, 513 f are disposed as if two different from the above cases out of the monitor electrodes 213 f, 213 f, 213 f, 213 f are removed from the ring-shaped vibrating gyroscope 800 shown in FIG. 14A. However, an effect similar to that of the first embodiment is exerted even with the disposition of the monitor electrodes 513 f, 513 f shown in FIG. 14D.

Moreover, a different example of the above is a ring-shaped vibrating gyroscope 880 shown in FIG. 14E. Some of monitor electrodes 613 f, 613 f, 613 f, 613 f of the ring-shaped vibrating gyroscope 880 are disposed in a region from the inner peripheral edge to the center line of the ring-shaped vibrating body 11. Each of second detection electrodes 13 d, 13 e has a smaller area. However, an effect similar to that of the first embodiment is exerted even with the disposition of the monitor electrodes 613 f, 613 f. 613 f, 613 f, shown in FIG. 14E, except that the sensitivity of each of the detection electrodes is deteriorated to result in decrease in ratio of S (signal) and N (noise) (what is called an S/N ratio). Similarly, even in a case where some or all of the monitor electrodes 613 f, 613 f, 613 f, 613 f are disposed in a region from the outer peripheral edge to the center line of the ring-shaped vibrating body 11, an effect similar to that of the first embodiment is exerted.

The above technical idea on the disposition of the monitor electrodes 13 f is applicable to the second embodiment described above. More specifically, for example, an effect of the second embodiment is substantially exerted by disposing each of the monitor electrodes so as not to be 30° apart from the corresponding driving electrode, like monitor electrodes 713 f, 713 f, 713 f, 713 f of a ring-shaped vibrating gyroscope 900 shown in FIG. 14F.

As shown in each of the examples described above, in any one of the ring-shaped vibrating gyroscopes according to the present invention, excited is the primary vibration in the out-of-plane vibration mode. Thus, the monitor electrodes may be disposed on the plane of the ring-shaped vibrating body 11 with a high degree of flexibility as long as being in a region from the inner peripheral edge to the outer peripheral edge thereof. However, for example, in a vibration mode of cos Nθ, when L=0, 1, . . . , 2N−1 (hereinafter, always true in this paragraph), the respective monitor electrodes 13 f are disposed so as not to be (180/N)×{L+(½)}]° apart from the reference driving electrode in the circumferential direction or are disposed so as not to be axisymmetrical with respect to the above angular positions. The monitor electrodes are not disposed at such former positions since deformation of the ring-shaped vibrating body 11 is eliminated (zero) at the former positions. The monitor electrodes are not disposed at such latter positions since the electrodes are deformed in directions opposite to each other so as to cancel the deformations each other. In a limited planar region of the ring-shaped vibrating body 11 that is particularly reduced in size, the disposition of the monitor electrodes 13 f as in the first embodiment will facilitate the disposition of the other electrode groups and/or the metal tracks. More specifically, when N is a natural number of 2 or more or a natural number of 3 or more and M=0, 1, . . . , N−1 (hereinafter, always true in this paragraph), in a case where one of the driving electrodes 13 a is set as a reference driving electrode, it is a preferable aspect to dispose the monitor electrodes 13 f so as to be [(360/N)×{M+(½)}]° apart from the reference driving electrode 13 a in the circumferential direction.

Moreover, adopted in each of the embodiments described above is the ring-shaped vibrating gyroscope that is mainly made of silicon. However, these embodiments are not limited to such a case. Alternatively, the main material for the vibrating gyroscope may be germanium or silicon germanium, for example. In the above examples, it is possible to apply the known anisotropic dry etching technique by particularly adopting silicon or silicon germanium, which results in significant contribution to the improvement in processing accuracy of the entire gyroscope including the vibrating body. As having been described so far, modifications made within the scope of the present invention inclusive of other combinations of the respective embodiments will be also included in the scope of the patent claims.

INDUSTRIAL APPLICABILITY

The present invention is applicable, as a vibrating gyroscope, to portions of various types of devices. 

1-11. (canceled)
 12. A vibrating gyroscope comprising: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof, wherein the plurality of electrodes include: (1) when N is a natural number of 2 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and (2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N+1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N (hereinafter true), the group of detection electrodes having an electrode disposed [{360/(N+1)}×S]° apart from the reference driving electrode and/or an electrode disposed [{360/(N+1)}×{S+(½)}]° apart from the reference driving electrode, and each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.
 13. A vibrating gyroscope comprising: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof, wherein the plurality of electrodes include: (1) when N is a natural number of 2 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and (2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N+1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N (hereinafter true), the group of detection electrodes having an electrode disposed [{360/(N+1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N+1)}×{S+(¾)}]° apart from the reference driving electrode, and each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.
 14. A vibrating gyroscope comprising: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof, wherein the plurality of electrodes include: (1) when N is a natural number of 3 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and (2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N−1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N−2 (hereinafter true), the group of detection electrodes having an electrode disposed [{360/(N−1)}×S]° apart from the reference driving electrode and/or an electrode disposed [{360/(N−1)}×{S+(½)}]° apart from the reference driving electrode, and each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.
 15. A vibrating gyroscope comprising: a ring-shaped vibrating body having a uniform plane; a leg portion flexibly supporting the ring-shaped vibrating body and having a fixed end; a fixed potential electrode; and a plurality of electrodes formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof, wherein the plurality of electrodes include: (1) when N is a natural number of 3 or more, a group of driving electrodes for exciting a primary vibration of the ring-shaped vibrating body in a vibration mode of cos Nθ, which are disposed (360/N)° apart from each other in a circumferential direction; and (2) a group of detection electrodes for detecting a secondary vibration in a vibration mode of cos(N−1)θ generated when an angular velocity is applied to the ring-shaped vibrating body, and, when one of the driving electrodes is set as a reference driving electrode and S=0, 1, . . . , N−2 (hereinafter true), the group of detection electrodes having an electrode disposed [{360/(N−1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N−1)}×{S+(¾)}]° apart from the reference driving electrode, and each of the driving electrodes is disposed on a first electrode disposition portion in the plane, and each of the detection electrodes is disposed on a second electrode disposition portion that is not electrically connected to the first electrode disposition portion and has a region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.
 16. The vibrating gyroscope according to claim 12, wherein when the detection electrodes are referred to as first detection electrodes, the plurality of electrodes further include: (3) a group of second detection electrodes for detecting a secondary vibration of a vibration axis {90/(N+1)}° apart from that of the secondary vibration in (2), and the group of second detection electrodes having an electrode disposed [{360/(N+1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N+1)}×{S+(¾)}]° apart from the reference driving electrode, and each of the second detection electrodes is disposed on the second electrode disposition portion.
 17. The vibrating gyroscope according to claim 14, wherein when the detection electrodes are referred to as first detection electrodes, the plurality of electrodes further include: (3) a group of second detection electrodes for detecting a secondary vibration of a vibration axis {90/(N−1)}° apart from that of the secondary vibration in (2), and the group of second detection electrodes having an electrode disposed [{360/(N−1)}×{S+(¼)}]° apart from the reference driving electrode and/or an electrode disposed [{360/(N−1)}×{S+(¾)}]° apart from the reference driving electrode, and each of the second detection electrodes is disposed on the second electrode disposition portion.
 18. The vibrating gyroscope according to claim 12, wherein the plurality of electrodes further include: (4) when M=0, 1, . . . , 2N−1 (hereinafter true), a group of monitor electrodes disposed so as not to be (180/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 19. The vibrating gyroscope according to claim 13, wherein the plurality of electrodes further include: (4) when M=0, 1, . . . , 2N−1 (hereinafter true), a group of monitor electrodes disposed so as not to be (180/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 20. The vibrating gyroscope according to claim 14, wherein the plurality of electrodes further include: (4) when M=0, 1, . . . , 2N−1 (hereinafter true), a group of monitor electrodes disposed so as not to be (180/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 21. The vibrating gyroscope according to claim 15, wherein the plurality of electrodes further include: (4) when M=0, 1, . . . , 2N−1 (hereinafter true), a group of monitor electrodes disposed so as not to be (180/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 22. The vibrating gyroscope according to claim 12, wherein the plurality of electrodes further include: (4) when one of the driving electrodes is set as a reference driving electrode and M=0, 1, . . . , N−1 (hereinafter true), a group of monitor electrodes disposed (360/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 23. The vibrating gyroscope according to claim 13, wherein the plurality of electrodes further include: (4) when one of the driving electrodes is set as a reference driving electrode and M=0, 1, . . . , N−1 (hereinafter true), a group of monitor electrodes disposed (360/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 24. The vibrating gyroscope according to claim 14, wherein the plurality of electrodes further include: (4) when one of the driving electrodes is set as a reference driving electrode and M=0, 1, . . . , N−1 (hereinafter true), a group of monitor electrodes disposed (360/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 25. The vibrating gyroscope according to claim 15, wherein the plurality of electrodes further include: (4) when one of the driving electrodes is set as a reference driving electrode and M=0, 1, . . . , N−1 (hereinafter true), a group of monitor electrodes disposed (360/N)×{M+(½)}° apart from the reference driving electrode in the circumferential direction.
 26. The vibrating gyroscope according to claim 12, wherein the first electrode disposition portion includes a center line connecting centers in a width direction from the outer peripheral edge to the inner peripheral edge.
 27. The vibrating gyroscope according to claim 13, wherein the first electrode disposition portion includes a center line connecting centers in a width direction from the outer peripheral edge to the inner peripheral edge.
 28. The vibrating gyroscope according to claim 14, wherein the first electrode disposition portion includes a center line connecting centers in a width direction from the outer peripheral edge to the inner peripheral edge.
 29. The vibrating gyroscope according to claim 15, wherein the first electrode disposition portion includes a center line connecting centers in a width direction from the outer peripheral edge to the inner peripheral edge.
 30. The vibrating gyroscope according to claim 12, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film, the piezoelectric film, and the lower-layer metallic film are substantially visible in a front view.
 31. The vibrating gyroscope according to claim 13, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film, the piezoelectric film, and the lower-layer metallic film are substantially visible in a front view.
 32. The vibrating gyroscope according to claim 14, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film, the piezoelectric film, and the lower-layer metallic film are substantially visible in a front view.
 33. The vibrating gyroscope according to claim 15, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film, the piezoelectric film, and the lower-layer metallic film are substantially visible in a front view.
 34. The vibrating gyroscope according to claim 12, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film and the lower-layer metallic film are substantially visible in a front view.
 35. The vibrating gyroscope according to claim 13, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film and the lower-layer metallic film are substantially visible in a front view.
 36. The vibrating gyroscope according to claim 14, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film and the lower-layer metallic film are substantially visible in a front view.
 37. The vibrating gyroscope according to claim 15, wherein the ring-shaped vibrating body is formed with a silicon substrate, and only the upper-layer metallic film and the lower-layer metallic film are substantially visible in a front view. 